Prof. Paul Kim Ho CHU (朱劍豪)

Research Output

  1. 1996
  2. Published

    Improving the impact energy by using auxiliary electrode in a cylindrical bore

    Zeng, X. C., Wang, S. Y., Xing, D. Z., Gao, Y., Liu, A. G., Tang, B. Y. & Chu, P. K., 1996, In: IEEE International Conference on Plasma Science.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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  3. Operational phase-space of separation by plasma implantation of oxygen (SPIMOX)

    Iyer, S. S. K., Lu, X., Liu, J., Linder, B., Hu, C., Cheung, N. W., Min, J. & 2 others, Fan, Z. & Chu, P., 1996, Proceedings of the International Conference on Ion Implantation Technology. IEEE, p. 764-767

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  4. Published

    Post-Implant Anneal: Fundamental Differences in Dopant Diffusion and Activation due to Rapid Thermal Annealing / Furnace Annealing

    Choi, P. S., Su, T., Chang, R. D., Chu, P. K. & Kwong, D. L., 1996, MEETING ABSTRACTS. Vol. 96-1. p. 441-442

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  5. Published

    Profiling Sub-100nm Shallow Junctions by Secondary Ion Mass Spectrometry (SIMS)

    Chu, P. K., Chia, V. K. F., Smith, S. P. & Magee, C. W., 1996, 1996 International Electron Devices and Materials Symposia: Symposium C, E, F. p. 61-64

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  6. SOI material technology using plasma immersion ion implantation

    Lu, X., Iyer, S. S. K., Min, J., Fan, Z., Liu, J. B., Chu, P. K., Hu, C. & 1 others, Chueng, N. W., 1996, IEEE International SOI Conference. IEEE, p. 48-49

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

    Scopus citations: 6
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  7. Published

    Synthesis of SOI materials using plasma immersion ion implantation

    Chu, P. K., 1996, In: Materials Research Society Symposium - Proceedings. 438, p. 333-343

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 5
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  8. 1995
  9. Published

    LOW-VOLTAGE AND HIGH-SPEED CMOS/SIMOX TECHNOLOGY

    Zhang, X., Wei, L., Xi, X., Wang, Y. & Chu, P. K., Oct 1995, PROCEEDINGS OF THE FOURTH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY. BALDWIN, G. L., LI, Z. & TSAI, C. C. (eds.). IEEE, p. 257-259

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  10. Published

    形成 SIMOX 结构的 PIII 新技术的研究

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Iyer, S. & Cheng, N. W., Aug 1995, In: 半导体学报. 16, 8, p. 636-640

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 3
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  11. Atomic force microscopy (AFM) statistical process control for microelectronics applications

    Chu, P. K., Brigham, R. G. & Baumann, S. M., Jun 1995, In: Materials Chemistry & Physics. 41, 1, p. 61-65

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 4
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  12. Published

    Buried oxide formation by plasma immersion ion implantation

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Im, S., Iyer, S. & Cheung, N. W., Apr 1995, In: Materials Chemistry & Physics. 40, 3, p. 219-222

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 25
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  13. Published

    Development of the Industrial Prototype of the Plasma Immersion Ion Implantation

    Tang, B., Wang, S., Yang, S., Chu, P. K., Gau, Y. & Zeng, X., Feb 1995.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  14. High Dose-Rate SIMOX Synthesis by Plasma Implantation

    Liu, J., Iyer, S. S., Hu, C., Cheung, N. W., Min, J. & Chu, P. K., Feb 1995.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  15. Application of imaging TOF-SIMS to the study of some coal macerals

    Hou, X., Ren, D., Mao, H., Lei, J., Jin, K., Chu, P. K., Reich, F. & 1 others, Wayne, D. H., Jan 1995, In: International Journal of Coal Geology. 27, 1, p. 23-32

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 29
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  16. Application of TOF-SIMS to microelectronics

    Chu, P. K., 1995, International Conference on Solid-State and Integrated Circuit Technology Proceedings. IEEE, p. 742-744

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  17. Competitive oxidation during buried oxide formation using separation by plasma implantation of oxygen (SPIMOX)

    Liu, J., Iyer, S. S. K., Min, J., Chu, P., Gronsky, R., Hu, C. & Cheung, N. W., 1995, In: Materials Research Society Symposium - Proceedings. 388, p. 385-391

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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  18. Published

    Current Status of SIMS Bulk Analysis in Silicon

    Chu, P. K. & Bleiler, R. J., 1995, Proceedings of the Tenth International Conference on Secondary Ion Mass Spectrometry (SIMS X). Benninghoven, A., Hagenhoff, B. & Werner, H. (eds.). John Wiley & Sons, p. 549-552

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  19. Published

    Economical fabrication technique for SIMOX using plasma immersion ion implantation

    Min, J., Chu, P. K., Cheng, Y. C., Liu, J. B., Iyer, S. S. K. & Cheung, N. W., 1995, International Conference on Solid-State and Integrated Circuit Technology Proceedings. IEEE, p. 253-256

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  20. Published

    Formation of buried oxide in silicon using separation by plasma implantation of oxygen

    Liu, J., Sundar Kumar Iyer, S., Hu, C., Cheung, N. W., Gronsky, R., Min, J. & Chu, P., 1995, In: Applied Physics Letters. 67

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 56
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  21. Observation of solid phase epitaxial growth of amorphous SiGe on Si(100) substrate

    Qi, W. J., Li, B. Z., Jiang, G. B., Gu, Z. G., Kwok, T. K., Zhang, R. J. & Chu, P. K., 1995, IEEE Region 10 Annual International Conference, Proceedings/TENCON. IEEE, p. 404-407

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  22. Spreading resistance profiling study of GeSi/Si structures by high dose Ge implantation into Si

    Cheung, W. Y., Wong, S. P., Wilson, I. H., Zhang, T. & Chu, P. K., 1995, In: Materials Research Society Symposium - Proceedings. 354, p. 201-206

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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