Prof. Paul Kim Ho CHU (朱劍豪)

Research Output

  1. 1997
  2. Published

    On the formation of solid state crystallized intrinsic polycrystalline germanium thin films

    Meng, Z., Jin, Z., Bhat, G. A., Chu, P., Kwok, H. S. & Wong, M., Oct 1997, In: Journal of Materials Research. 12, 10, p. 2548-2551

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 5
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  3. Published

    Hydrogen induced silicon surface layer cleavage

    Lu, X., Cheung, N. W., Strathman, M. D., Chu, P. K. & Doyle, B., 29 Sep 1997, In: Applied Physics Letters. 71, 13, p. 1804-1806

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 67
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  4. Published

    CORRELATION BETWEEN SURFACE SIMS AND TXRF MEASUREMENTS OF SURFACE METAL CONTAMINATION ON SILICON

    Smith, S. P., Metz, J. & CHU, P. K., Sep 1997, Proceedings of the Eleventh International Conference on Secondary Ion Mass Spectrometry. Gillen, G., Lareau, R., Bennett, J. & Stevie, F. (eds.). John Wiley & Sons, p. 233-236

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  5. Quantification of SurfaceSIMS Data: The Influence of Oxygen-Flooding on Secondary Ion Yields during SIMS Analysis of Silicon

    Smith, S. P. & Chu, P. K., Sep 1997, p. 203.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  6. Published

    Radio-frequency plasma nitriding and nitrogen plasma immersion ion implantation of Ti-6Al-4V alloy

    Wang, S. Y., Chu, P. K., Tang, B. Y., Zeng, X. C., Chen, Y. B. & Wang, X. F., Sep 1997, In: Surface and Coatings Technology. 93, 2-3, p. 309-313

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 45
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  7. Ultra-Shallow Junction Measurements: Optimizing SIMS for Implanted and Processed Wafers

    Chia, V. K. F., Edgell, M. J. & Chu, P. K., Sep 1997, p. 180.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  8. Published

    Effects of the auxiliary electrode radius during plasma immersion ion implantation of a small cylindrical bore

    Zeng, X. C., Kwok, T. K., Liu, A. G., Chu, P. K., Tang, B. Y. & Sheridan, T. E., 25 Aug 1997, In: Applied Physics Letters. 71, 8, p. 1035-1037

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 32
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  9. Published

    Microcavity Engineering in Silicon for Integrated Circuit Application

    Cheung, N. W., Fan, Z., Min, J. & CHU, P. K., Aug 1997.

    Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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  10. Published

    Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation

    Min, J., Chu, P. K., Lu, X., Iyer, S. S. K. & Cheung, N. W., 28 May 1997, In: Thin Solid Films. 300, 1-2, p. 64-67

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 10
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  11. Published

    Improvement of the corrosion property of Cr4Mo4V bearing steel using plasma immersion ion implantation

    Wang, S. Y., Chu, P. K., Tang, B. Y., Zeng, X. C. & Wang, X. F., May 1997, In: Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 127-128, p. 1000-1003

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 49
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  12. Published

    Study of Plasma Chemistry in Plasma Doping Processes

    Qin, S., Zhou, Y., Chan, C., Shao, J., Denholm, S. & CHU, P., May 1997, IEEE CONFERENCE RECORD - ABSTRACTS: 1997 IEEE International Conference on Plasma Science. p. 151 (IEEE International Conference on Plasma Science).

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  13. Published

    Transient Sheath in a Small Cylindrical Bore with an Auxiliary Electrode for Finite-Rise-Time Voltage Pulses

    Zeng, X. C., Kwok, T. K., Liu, A. G., Chu, P. K. & Tang, B. Y., May 1997, IEEE CONFERENCE RECORD - ABSTRACTS: 1997 IEEE International Conference on Plasma Science. p. 215-216 (IEEE International Conference on Plasma Science).

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)peer-review

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  14. Published

    Germanium thin film formation by low-pressure chemical vapor deposition

    Meng, Z., Jin, Z., Gururaj, B. A., Chu, P., Kwok, H. S. & Wong, M., Apr 1997, In: Journal of the Electrochemical Society. 144, 4, p. 1423-1429

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 17
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  15. Published

    Principles and characteristics of a new generation plasma immersion ion implanter

    Chu, P. K., Tang, B. Y., Cheng, Y. C. & Ko, P. K., Apr 1997, In: Review of Scientific Instruments. 68, 4, p. 1866-1874

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 145
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  16. Published

    Separation of plasma implantation of oxygen to form silicon on insulator

    Lu, X., Iyer, S. K., Liu, J., Hu, C., Cheung, N. W., Min, J. & Chu, P. K., 31 Mar 1997, In: Applied Physics Letters. 70, 13, p. 1748-1750

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 28
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  17. Published

    Investigation on solid phase epitaxy of deposited SiGe film on a Si substrate

    Qi, W., Li, B., Jiang, G., Gu, Z., Kwok, T. K., Zhang, R. J. & Chu, P. K., 30 Jan 1997, In: Thin Solid Films. 293, 1-2, p. 310-314

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 5
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  18. Published

    Boron segregation in As implanted Si due to electric field and transient enhanced diffusion

    Chang, R. D., Choi, P. S., Wristers, D., Chu, P. K. & Kwong, D. L., 1997, In: Proceedings of SPIE - The International Society for Optical Engineering. 3212, p. 296-303

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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  19. Published

    DOPING PROPERTIES OF THE ION-BEAM-SPUTTERED SiGe FILM

    Qi, W., Wang, Z., Gu, Z., Ru, G., Jiang, G., Li, B. & Chu, P. K., 1997, In: Materials Research Society Symposium - Proceedings. 441, p. 289-293

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 1
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  20. Published

    Evidence that N2O is a stronger oxidizing agent than O2 for the post-deposition annealing of Ta2O5 on Si capacitors

    Lau, W. S., Qian, P. W., Sandler, N. P., McKinley, K. A. & Chu, P. K., 1997, In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 36, 2, p. 661-666

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 49
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  21. Published

    Formation of buried porous silicon structure by hydrogen plasma immersion ion implantation

    Fan, Z., Chu, P. K., Lu, X., Iyer, S. S. K. & Cheung, N. W., 1997, In: Materials Research Society Symposium - Proceedings. 452, p. 427-430

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

    Scopus citations: 1
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