CHAO Ming Yu (周明愉)

Research Output

  1. 2017
  2. Published

    An aluminum nitride on silicon resonant MEMS accelerometer operating in ambient pressure

    Chao, M. Y., Ali, A., Ghosh, S. & Lee, J. E., Jun 2017, TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., p. 607-610 7994122

    Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with ISBN/ISSN)Not applicablepeer-review

    Scopus citations: 5
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