Thin Solid Films

Thin Solid Films

ISSNs: 0040-6090

Additional searchable ISSN (Electronic): 1879-2731

Elsevier BV, Netherlands

Scopus rating (2021): CiteScore 4.3 SJR 0.468 SNIP 0.772

Journal

Journal Metrics

Research Output

  1. 2006
  2. Published

    Current transport and high-field reliability of aluminum/hafnium oxide/silicon structure

    Sen, B., Wong, H., Filip, V., Choi, H. Y., Sarkar, C. K., Chan, M., Kok, C. W. & 1 others, Poon, M. C., 10 May 2006, In: Thin Solid Films. 504, 1-2, p. 312-316

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 15
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  3. Published

    Liquid and solid state interfacial reactions of Sn-Ag-Cu and Sn-In-Ag-Cu solders with Ni-P under bump metallization

    Sharif, A. & Chan, Y. C., 10 May 2006, In: Thin Solid Films. 504, 1-2, p. 431-435

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 32
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  4. Published

    Material properties of interfacial silicate layer and its influence on the electrical characteristics of MOS devices using hafnia as the gate dielectric

    Wong, H., Sen, B., Filip, V. & Poon, M. C., 10 May 2006, In: Thin Solid Films. 504, 1-2, p. 192-196

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 34
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  5. Published

    Stressing effects on the charge trapping of silicon oxynitride prepared by thermal oxidation of LPCVD Si-rich silicon nitride

    Choi, H. Y., Wong, H., Filip, V., Sen, B., Kok, C. W., Chan, M. & Poon, M. C., 10 May 2006, In: Thin Solid Films. 504, 1-2, p. 7-10

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 4
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  6. Mechanism for Cu void defect on various electroplated film conditions

    Feng, H. P., Cheng, M. Y., Wang, Y. L., Chang, S. C., Wang, Y. Y. & Wan, C. C., 1 Mar 2006, In: Thin Solid Films. 498, 1-2, p. 56-59

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 14
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  7. Published

    Surface growth of (Ti,Al)N thin films on smooth and rough substrates

    Liu, Z. J., Shum, P. W. & Shen, Y. G., 21 Feb 2006, In: Thin Solid Films. 496, 2, p. 326-332

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 8
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  8. 2005
  9. Published

    Effects of pretreatment by ion implantation and interlayer on adhesion between aluminum substrate and TiN film

    Liu, Y., Li, L., Cai, X., Chen, Q., Xu, M., Hu, Y., Cheung, T. & 2 others, Shek, C. H. & Chu, P. K., 22 Dec 2005, In: Thin Solid Films. 493, 1-2, p. 152-159

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 25
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  10. Published

    Anodizing process of Al films on Si substrates for forming alumina templates with short-distance ordered 25 nm nanopores

    Mei, Y. F., Wu, X. L., Qiu, T., Shao, X. F., Siu, G. G. & Chu, P. K., 1 Dec 2005, In: Thin Solid Films. 492, 1-2, p. 66-70

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 9
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  11. Published

    Formation of titanium nitride barrier layer in nickel-titanium shape memory alloys by nitrogen plasma immersion ion implantation for better corrosion resistance

    Poon, R. W., Ho, J. P., Liu, X., Chung, C. Y., Chu, P. K., Yeung, K. W., Lu, W. W. & 1 others, Cheung, K. M. C., 22 Sep 2005, In: Thin Solid Films. 488, 1-2, p. 20-25

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 59
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  12. Published

    Effects of tantalum ion implantation on the surface properties of Al-Mg alloy

    Zhang, D. Y., Fei, Q. Y., Zhao, H. M., Geng, M., Zeng, X. C. & Chu, P. K., 22 Jul 2005, In: Thin Solid Films. 484, 1-2, p. 215-218

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 5
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  13. Initial growth of chemical-vapor-deposited Ru from bis(hexafluoroacetylacetonate)dicarbonyl ruthenium

    Cheng, W., Hong, L., Jiang, J., Chi, Y. & Lin, C., 1 Jul 2005, In: Thin Solid Films. 483, 1-2, p. 31-37

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 8
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  14. Published

    Preparation of AlCuFe quasicrystalline film by pulsed laser-arc deposition

    Sedao, Shao, T., Mou, H. & Hua, M., 1 Jul 2005, In: Thin Solid Films. 483, 1-2, p. 1-5

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 5
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  15. Published

    Structural properties of sputter-deposited CNx/TiN multilayer films

    Liu, Z. J., Vyas, A., Lu, Y. H. & Shen, Y. G., 23 May 2005, In: Thin Solid Films. 479, 1-2, p. 31-37

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 16
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  16. Published

    Microstructure and electrical properties of Al2O 3-ZrO2 composite films for gate dielectric applications

    Zhu, M., Chen, P., Fu, R. K. Y., Liu, W., Lin, C. & Chu, P. K., 8 Apr 2005, In: Thin Solid Films. 476, 2, p. 312-316

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 22
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  17. 2004
  18. Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films

    Collins, R. W., An, I., Chen, C., Ferlauto, A. S. & Zapien, J. A., 22 Dec 2004, In: Thin Solid Films. 469-470, SPEC. ISS., p. 38-46

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 5
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  19. The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

    He, J. H., Chueh, Y. L., Wu, W. W., Lee, S. W., Chen, L. J. & Chou, L. J., 22 Dec 2004, In: Thin Solid Films. 469-470, p. 478-482

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 8
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  20. Published

    Hardening mechanisms of nanocrystalline Ti-Al-N solid solution films

    Liu, Z. J., Shum, P. W. & Shen, Y. G., 1 Dec 2004, In: Thin Solid Films. 468, 1-2, p. 161-166

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 67
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  21. Elasto-plastic deformation and fracture mechanism of a diamond-like carbon film deposited on a Ti-6Al-4V substrate in nano-scratch test

    Huang, L., Lu, J. & Xu, K., 1 Nov 2004, In: Thin Solid Films. 466, 1-2, p. 175-182

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 32
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  22. Published

    Flexible organic light-emitting device based on magnetron sputtered indium-tin-oxide on plastic substrate

    Wong, F. L., Fung, M. K., Tong, S. W., Lee, C. S. & Lee, S. T., 1 Nov 2004, In: Thin Solid Films. 466, 1-2, p. 225-230

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 101
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  23. Published

    Bonding structures of silicon oxynitride prepared by oxidation of Si-rich silicon nitride

    Poon, M. C., Kok, C. W., Wong, H. & Chan, P. J., Sep 2004, In: Thin Solid Films. 462-463, SPEC. ISS., p. 42-45

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 45
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