Review of Scientific Instruments

Review of Scientific Instruments

ISSNs: 0034-6748

Additional searchable ISSN (Electronic): 1089-7623

A I P Publishing LLC, United States

Scopus rating (2021): CiteScore 3.1 SJR 0.606 SNIP 0.913

Journal

Journal Metrics
21 - 36 out of 36Page size: 20

Research Output

  1. 2005
  2. Published

    Linear ion source with magnetron hollow cathode discharge

    Tang, D. L., Pu, S. H., Wang, L. S., Qiu, X. M. & Chu, P. K., 2005, In: Review of Scientific Instruments. 76, 11, p. 1-4 113502.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 62_Review of books or of software (or similar publications/items) › peer-review

    Scopus citations: 16
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  3. 2004
  4. Published

    Synthesis of aluminum nitride films by plasma immersion ion implantation-deposition using hybrid gas-metal cathodic arc gun

    Shen, L., Fu, R. K. Y. & Chu, P. K., Mar 2004, In: Review of Scientific Instruments. 75, 3, p. 719-724

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 8
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  5. 2003
  6. Published

    Flexible system for multiple plasma immersion ion implantation-deposition processes

    Tian, X., Fu, R. K. Y., Chu, P. K., Anders, A., Gong, C. & Yang, S., Dec 2003, In: Review of Scientific Instruments. 74, 12, p. 5137-5140

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 11
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  7. Published

    Hybrid evaporation: Glow discharge source for plasma immersion ion implantation

    Li, L. H., Poon, R. W. Y., Kwok, S. C. H., Chu, P. K., Wu, Y. Q. & Zhang, Y. H., Oct 2003, In: Review of Scientific Instruments. 74, 10, p. 4301-4304

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 22
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  8. Published

    Enhancement of implantation energy using a conducting grid in plasma immersion ion implantation of dielectric/polymeric materials

    Fu, R. K. Y., Tian, X. & Chu, P. K., Aug 2003, In: Review of Scientific Instruments. 74, 8, p. 3697-3700

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 28
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  9. Published

    Improved planar radio frequency inductively coupled plasma configuration in plasma immersion ion implantation

    Tang, D. L., Fu, R. K. Y., Tian, X. B. & Chu, P. K., May 2003, In: Review of Scientific Instruments. 74, 5, p. 2704-2708

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 13
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  10. 2002
  11. Published

    Automatically reigniting dc vacuum arc plasma source

    Li, L., Zhang, T., Chu, P. K. & Brown, I. G., Aug 2002, In: Review of Scientific Instruments. 73, 8

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 5
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  12. 2001
  13. Published

    Third-generation plasma immersion ion implanter for biomedical materials and research

    Chu, P. K., Tang, B. Y., Wang, L. P., Wang, X. F., Wang, S. Y. & Huang, N., Mar 2001, In: Review of Scientific Instruments. 72, 3, p. 1660-1665

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 105
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  14. 2000
  15. Published

    Characteristics and design of metal vacuum arc plasma source power supply for pulsed-mode plasma immersion ion implantation

    Wang, L. P., Gan, K. Y., Tian, X. B., Tang, B. Y. & Chu, P. K., Dec 2000, In: Review of Scientific Instruments. 71, 12, p. 4435-4437

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 6
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  16. Published

    Direct temperature monitoring for semiconductors in plasma immersion ion implantation

    Tian, X. & Chu, P. K., Jul 2000, In: Review of Scientific Instruments. 71, 7, p. 2839-2842

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 19
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  17. 1999
  18. Published

    Pure high dose metal ion implantation using the plasma immersion technique

    Zhang, T., Tang, B. Y., Zeng, Z. M., Kwok, T. K., Chu, P. K., Monteiro, O. R. & Brown, I. G., Nov 1999, In: Review of Scientific Instruments. 70, 11, p. 4359-4361

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 6
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  19. Published

    Vacuum arc plasma transport through a magnetic duct with a biased electrode at the outer wall

    Zhang, T., Tang, B. Y., Chen, Q. C., Zeng, Z. M., Chu, P. K., Bilek, M. M. M. & Brown, I. G., Aug 1999, In: Review of Scientific Instruments. 70, 8, p. 3329-3331

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 19
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  20. Published

    In situ sample temperature measurement in plasma immersion ion implantation

    Tian, X., Fan, Z., Zeng, X., Zeng, Z., Tang, B. & Chu, P. K., Jun 1999, In: Review of Scientific Instruments. 70, 6, p. 2818-2821

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 17
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  21. Published

    Special modulator for high frequency, low-voltage plasma immersion ion implantation

    Tian, X., Wang, X., Tang, B., Chu, P. K., Ko, P. K. & Cheng, Y., Mar 1999, In: Review of Scientific Instruments. 70, 3, p. 1824-1828

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 34
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  22. 1998
  23. Published

    A novel distributed system for plasma immersion ion implanter control and automation

    Liu, A. G., Wang, X. F., Tang, B. Y., Chu, P. K., Ko, P. K. & Cheng, Y. C., Mar 1998, In: Review of Scientific Instruments. 69, 3, p. 1495-1498

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 3
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  24. 1997
  25. Published

    Principles and characteristics of a new generation plasma immersion ion implanter

    Chu, P. K., Tang, B. Y., Cheng, Y. C. & Ko, P. K., Apr 1997, In: Review of Scientific Instruments. 68, 4, p. 1866-1874

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 146
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