Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

ISSNs: 2166-2746

Additional searchable ISSN (electronic): 2166-2754

A I P Publishing LLC, United States

Scopus rating (2023): CiteScore 2.7 SJR 0.328 SNIP 0.702

Journal

Journal Metrics

Research Output

  1. 2019
  2. Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip

    Chang, J.-M., Wu, W.-J., Chang, W.-Y., Chen, F.-R. & Tseng, F.-G., May 2019, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 37, 3, 032001.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Check@CityULib
  3. 2013
  4. In-rich InGaN thin films: Progress on growth, compositional uniformity, and doping for device applications

    Hoffbauer, M. A., Williamson, T. L., Williams, J. J., Fordham, J. L., Yu, K. M., Walukiewicz, W. & Reichertz, L. A., May 2013, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 31, 3, 03C114.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 18
    Check@CityULib
  5. Molecular beam epitaxy of highly mismatched N-rich GaN1-xSbx and InN1-xAsx alloys

    Novikov, S. V., Yu, K. M., Levander, A., Detert, D., Sarney, W. L., Liliental-Weber, Z. & Shaw, M. & 4 others, Martin, R. W., Svensson, S. P., Walukiewicz, W. & Foxon, C. T., May 2013, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 31, 3, 03C102.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 11
    Check@CityULib
  6. 2012
  7. Discrepancies in performance for heterojunction organic field-effect transistors with different channel lengths

    Yu, X., Yu, J., Huang, W. & Han, S., Nov 2012, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30, 6, 062401.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Check@CityULib
  8. Published

    High resolution patterning on nonplanar substrates with large height variation using electron beam lithography

    Ray, V., Aida, Y., Funakoshi, R., Kato, H. & Pang, S. W., Nov 2012, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30, 6, 06F303.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 6
    Check@CityULib
  9. 2011
  10. Indium nitride epilayer prepared by UHV-plasma-assisted metalorganic molecule beam epitaxy

    Chen, W.-C., Kuo, S.-Y., Lai, F.-I., Lin, W.-T., Hsiao, C.-N. & Tsai, D. P., Sept 2011, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 5, 051204.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 9
    Check@CityULib
  11. 2010
  12. Published

    Germanium surface hydrophilicity and low-temperature Ge layer transfer by Ge- SiO2 bonding

    Ma, X., Liu, W., Du, X., Liu, X., Song, Z., Lin, C. & Chu, P. K., Jul 2010, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 4, p. 769-774

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 8
    Check@CityULib
  13. Molecular beam epitaxy of GaNAs alloys with high As content for potential photoanode applications in hydrogen production

    Novikov, S. V., Staddon, C. R., Foxon, C. T., Yu, K. M., Broesler, R., Hawkridge, M. & Liliental-Weber, Z. & 3 others, Walukiewicz, W., Denlinger, J. & Demchenko, I., May 2010, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 3

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 14
    Check@CityULib
  14. Published

    Model for trap-assisted electron tunneling in thin insulators

    Filip, V., Liu, J., Wong, C. K., Wong, H., Nicolaescu, D., Barna, V. & Barna, E. S., Mar 2010, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 2

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 1
    Check@CityULib