Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
ISSNs: 2166-2746
Additional searchable ISSN (electronic): 2166-2754
A I P Publishing LLC, United States
Scopus rating (2023): CiteScore 2.7 SJR 0.328 SNIP 0.702
Journal
Research Output
- 2019
Direct measurement of electrostatic fields within the Zernike electrostatic phase plate using single 155 nm Teflon nanoparticle attached to the pillar-shaped atomic force microscope tip
Chang, J.-M., Wu, W.-J., Chang, W.-Y., Chen, F.-R. & Tseng, F.-G., May 2019, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 37, 3, 032001.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
- 2013
In-rich InGaN thin films: Progress on growth, compositional uniformity, and doping for device applications
Hoffbauer, M. A., Williamson, T. L., Williams, J. J., Fordham, J. L., Yu, K. M., Walukiewicz, W. & Reichertz, L. A., May 2013, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 31, 3, 03C114.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 18Molecular beam epitaxy of highly mismatched N-rich GaN1-xSbx and InN1-xAsx alloys
Novikov, S. V., Yu, K. M., Levander, A., Detert, D., Sarney, W. L., Liliental-Weber, Z. & Shaw, M. & 4 others, , May 2013, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 31, 3, 03C102.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 11- 2012
Discrepancies in performance for heterojunction organic field-effect transistors with different channel lengths
Yu, X., Yu, J., Huang, W. & Han, S., Nov 2012, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30, 6, 062401.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
- Published
High resolution patterning on nonplanar substrates with large height variation using electron beam lithography
Ray, V., Aida, Y., Funakoshi, R., Kato, H. & Pang, S. W., Nov 2012, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 30, 6, 06F303.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 6 - 2011
Indium nitride epilayer prepared by UHV-plasma-assisted metalorganic molecule beam epitaxy
Chen, W.-C., Kuo, S.-Y., Lai, F.-I., Lin, W.-T., Hsiao, C.-N. & Tsai, D. P., Sept 2011, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 5, 051204.Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 9- 2010
- Published
Germanium surface hydrophilicity and low-temperature Ge layer transfer by Ge- SiO2 bonding
Ma, X., Liu, W., Du, X., Liu, X., Song, Z., Lin, C. & Chu, P. K., Jul 2010, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 4, p. 769-774Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 8 Molecular beam epitaxy of GaNAs alloys with high As content for potential photoanode applications in hydrogen production
Novikov, S. V., Staddon, C. R., Foxon, C. T., Yu, K. M., Broesler, R., Hawkridge, M. & Liliental-Weber, Z. & 3 others, , May 2010, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 3Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 14- Published
Model for trap-assisted electron tunneling in thin insulators
Filip, V., Liu, J., Wong, C. K., Wong, H., Nicolaescu, D., Barna, V. & Barna, E. S., Mar 2010, In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 28, 2Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Scopus citations: 1