Journal of Vacuum Science and Technology A

Journal of Vacuum Science and Technology A

ISSNs: 0734-2101

Additional searchable ISSN (Electronic): 1520-8559

AVS Science and Technology Society, United States

Scopus rating (2021): CiteScore 4.4 SJR 0.676 SNIP 0.992

Journal

Journal Metrics
1 - 20 out of 31Page size: 20

Research Output

  1. 2015

  2. Effect of porous morphology on phase transition in vanadium dioxide thin films

    Xu, H. Y., Huang, Y. H., Li, J. P., Ma, F. & Xu, K. W., Nov 2015, In: Journal of Vacuum Science and Technology A. 33, 6, 061508.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 15
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  3. 2014

  4. Characterization of the cleaning process on a transferred graphene

    Huang, L., Chang, C., Chien, F., Chen, K., Chen, P., Chen, F. & Chang, C., Sep 2014, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 32, 5, 050601.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
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  5. 2011

  6. Direct growth of hexagonal InN films on 6H-SiC by radio-frequency metal-organic molecular-beam epitaxy

    Chen, W., Kuo, S., Hsiao, C. & Tsai, D. P., Jan 2011, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 29, 1, 011009.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 3
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  7. 2010

  8. Fabrication of ZnO photonic crystals by nanosphere lithography using inductively coupled-plasma reactive ion etching with CH4/H2/Ar plasma on the ZnO/GaN heterojunction light emitting diodes

    Chen, S., Chang, C., Kao, J., Chen, F. & Tsai, C., 4 Jul 2010, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 28, 4, p. 745-749

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 9
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  9. Design and fabrication of optical thin films for remote sensing instruments

    Hsiao, C. N., Chen, H. P., Chiu, P. K., Cho, W. H., Lin, Y. W., Chen, F. Z. & Tsai, D. P., Jul 2010, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 28, 4, p. 867-872

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 8
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  10. 2006

  11. Writing and erasing efficiency analysis on optical-storage media using scanning surface potential microscopy

    Chen, S., Hou, S., Hsieh, J. H., Chen, H. K. & Tsai, D. P., 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 6, p. 2003-2007 005606JVA.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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  12. 2005

  13. Effect of plating current density and annealing on impurities in electroplated Cu film

    Liu, C., Wang, Y., Tsai, M., Feng, H., Chang, S. & Hwang, G., Jul 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 4, p. 658-662

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 22
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  14. Study of optical recording bits by scanning surface potential microscopy

    Chen, S., Lin, C., Lin, W. C. & Tsai, D. P., Jul 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 4, p. 663-665

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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  15. 2004

  16. Stacked polymer patterns imprinted using a soft inkpad

    Kong, Y. P., Tan, L., Pang, S. W. & Yee, A. F., Jul 2004, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 22, 4, p. 1873-1878

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
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  17. 2002

  18. Characterization of cubic boron nitride growth using UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps

    Zapien, J. A., Collins, R. W. & Messier, R., Jul 2002, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 20, 4, p. 1395-1397

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 11
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  19. 1998

  20. Cubic boron nitride thin film deposition by unbalanced magnetron sputtering and dc pulsed substrate biasing

    Otaño-Rivera, W., Pilione, L. J., Zapien, J. A. & Messier, R., May 1998, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 16, 3, p. 1331-1335

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 27
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  21. 1997

  22. Near-field optical recording on the cyanine dye layer of a commercial compact disk-recordable

    Tsai, D. P. & Guo, W. R., 1997, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 15, 3, p. 1442-1445

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 25
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  23. Optical fiber structures studied by a tapping-mode scanning near-field optical microscope

    Tsai, D. P. & Li, W. K., 1997, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 15, 3, p. 1427-1431

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
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  24. 1996

  25. Simulation and dry etching of field emitter tips in Si

    Rakhshandehroo, M. R., Sukardi, F. & Pang, S. W., May 1996, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 14, 3 pt 2, p. 1832-1838

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 7
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  26. Production of nanometric particles in radio frequency glow discharges in mixtures of silane and methane

    Bertram, E., Costa, J., Viera, G. & Zhang, R. Q., Mar 1996, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 14, 2, p. 567-571

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
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  27. 1995

  28. High-aspect-ratio Si etching for microsensor fabrication

    Juan, W. H. & Pang, S. W., May 1995, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 13, 3, p. 834-838

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 33
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  29. Initial growth of ultrathin Pd films on Cu(001)

    Yao, J., Shen, Y. G., O’Connor, D. J. & Kinag, B. V., May 1995, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 13, 3, p. 1443-1447

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 13
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  30. Monitoring InP and GaAs etched in Cl2/Ar using optical emission spectroscopy and mass spectrometry

    Thomas III, S., Ko, K. K. & Pang, S. W., May 1995, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 13, 3, p. 894-899

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 48
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  31. Structural study of the growth of thin Cu films on Ru(0001) by low-energy alkali ion scattering

    Shen, Y. G., O’Connor, D. J., Yao, J., Van Zee, H., Roberts, R. H. & MacDonald, R. J., May 1995, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 13, 3, p. 1478-1483

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 9
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  32. 1994

  33. Characterization of etch-induced damage for Si etched in Cl2 plasma generated by an electron cyclotron resonance source Plasma Generated by an Electron Cyclotron Resonance Source

    Sung, K. T. & Pang, S. W., Jul 1994, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 12, 4, p. 1346-1350

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
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