Journal of Vacuum Science and Technology A

Journal of Vacuum Science and Technology A

ISSNs: 0734-2101

Additional searchable ISSN (Electronic): 1520-8559

AVS Science and Technology Society, United States

Scopus rating (2021): CiteScore 4.4 SJR 0.676 SNIP 0.992

Journal

Journal Metrics
1 - 20 out of 76Page size: 20

Research Output

  1. 2022
  2. Published

    Hydrogen permeation barriers and preparation techniques: A review

    Xiao, S., Meng, X., Shi, K., Liu, L., Wu, H., Lian, W., Zhou, C., & 2 othersLyu, Y. & Chu, P. K., Dec 2022, In: Journal of Vacuum Science and Technology A. 40, 6, 060803.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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  3. 2017
  4. Published

    Microstructure and mechanical properties of (AlTi)xN1-x films by magnetic-field-enhanced high power impulse magnetron sputtering

    Tian, X., Ma, Y., Hu, J., Bi, M., Gong, C. & Chu, P. K., 1 Mar 2017, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 35, 2, 21402.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 9
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  5. 2015

  6. Effect of porous morphology on phase transition in vanadium dioxide thin films

    Xu, H. Y., Huang, Y. H., Li, J. P., Ma, F. & Xu, K. W., Nov 2015, In: Journal of Vacuum Science and Technology A. 33, 6, 061508.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 15
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  7. 2014

  8. Characterization of the cleaning process on a transferred graphene

    Huang, L., Chang, C., Chien, F., Chen, K., Chen, P., Chen, F. & Chang, C., Sep 2014, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 32, 5, 050601.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
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  9. 2012
  10. Published

    Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

    Wu, G., Ma, S., Xu, K., Ji, V. & Chu, P. K., Jul 2012, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 30, 4, 41508.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 3
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  11. Published

    Tribological behavior of Ti-Al-Si-C-N hard coatings deposited by hybrid arc-enhanced magnetron sputtering

    Wu, G., Ma, S., Xu, K. & Chu, P. K., Mar 2012, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 30, 2, 21501.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 5
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  12. 2011

  13. Direct growth of hexagonal InN films on 6H-SiC by radio-frequency metal-organic molecular-beam epitaxy

    Chen, W., Kuo, S., Hsiao, C. & Tsai, D. P., Jan 2011, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 29, 1, 011009.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 3
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  14. 2010

  15. Fabrication of ZnO photonic crystals by nanosphere lithography using inductively coupled-plasma reactive ion etching with CH4/H2/Ar plasma on the ZnO/GaN heterojunction light emitting diodes

    Chen, S., Chang, C., Kao, J., Chen, F. & Tsai, C., 4 Jul 2010, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 28, 4, p. 745-749

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 9
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  16. Design and fabrication of optical thin films for remote sensing instruments

    Hsiao, C. N., Chen, H. P., Chiu, P. K., Cho, W. H., Lin, Y. W., Chen, F. Z. & Tsai, D. P., Jul 2010, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 28, 4, p. 867-872

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 8
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  17. Published

    Enhanced retained dose uniformity in NiTi spinal correction rod treated by three-dimensional mesh-assisted nitrogen plasma immersion ion implantation

    Lu, Q. Y., Hu, T., Kwok, D. T. K. & Chu, P. K., May 2010, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 28, 3, p. 407-410

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 2
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  18. 2008
  19. Published

    Mechanical properties of amorphous hydrogenated carbon films fabricated on polyethylene terephthalate foils by plasma immersion ion implantation and deposition

    Li, J., Tian, X., Yang, S., Chu, P. K. & Fu, R. K. Y., 2008, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 26, 3, p. 438-443

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 2
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  20. Published

    Structure and mechanical properties of diamondlike carbon films produced by hollow-cathode plasma deposition

    Jiang, H. F., Tian, X. B., Yang, S. Q., Fu, R. K. Y. & Chu, P. K., 2008, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 26, 5, p. 1149-1153

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
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  21. 2007
  22. Published

    Annealing behavior and hardness enhancement of amorphous SiCN thin films

    Ma, S. L., Xu, B., Xu, K. W., Wu, X. L. & Chu, P. K., 2007, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 25, 5, p. 1407-1410

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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  23. Published

    Corrosion resistance of titanium ion implanted AZ91 magnesium alloy

    Liu, C., Xin, Y., Tian, X., Zhao, J. & Chu, P. K., 2007, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 25, 2, p. 334-339

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 69
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  24. Published

    Effects of bias on surface properties of TiN films fabricated by hollow cathode discharge

    Jiang, H. F., Tian, X. B., Yang, S. Q., Fu, R. K. Y. & Chu, P. K., 2007, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 25, 4, p. 837-842

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 2
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  25. Published

    Oxidation suppression in ytterbium silicidation by TiTiN bicapping layer

    Jiang, Y., Xie, Q., Detavernier, C., Van Meirhaeghe, R. L., Ru, G., Qu, X., Li, B., & 2 othersHuang, A. & Chu, P. K., 2007, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 25, 2, p. 285-289

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
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  26. Published

    Phase configuration, nanostructure evolution, and mechanical properties of unbalanced magnetron-sputtered Ti-Cx-Ny thin films

    Lu, Y. H., Shen, Y. G., Zhou, Z. F. & Li, K. Y., 2007, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 25, 6, p. 1539-1546

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
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  27. 2006
  28. Published

    Effects of pulsing parameters on production and distribution of macroparticles in cathodic vacuum arc deposition

    Hu, Y., Li, L., Dai, H., Li, X., Cai, X. & Chu, P. K., Jul 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 4, p. 957-961 084604JVA.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 2
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  29. Published

    Effects of nitrogen content on microstructure and oxidation behaviors of Ti-B-N nanocomposite thin films

    Lu, Y. H., Shen, Y. G., Zhou, Z. F. & Li, K. Y., Mar 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 2, p. 340-349

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 19
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  30. Published

    Experimental and numerical evaluations of adhesion strength and stress in TiN films deposited on ti-implanted aluminum

    Xu, M., Liu, Y., Li, L., Cai, X., Chen, Q. & Chu, P. K., Mar 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 2, p. 212-217

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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