Journal of Vacuum Science and Technology A

Journal of Vacuum Science and Technology A

ISSNs: 0734-2101

Additional searchable ISSN (Electronic): 1520-8559

AVS Science and Technology Society, United States

Scopus rating (2021): CiteScore 4.4 SJR 0.676 SNIP 0.992

Journal

Journal Metrics
41 - 60 out of 76Page size: 20

Research Output

  1. 2001
  2. Published

    Dynamic mixing deposition of niobium nitride films by cathodic arc plasma in ambient nitrogen

    Zhang, T., Song, J. H., Tian, X. B., Chu, P. K. & Brown, I. G., Sep 2001, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 19, 5, p. 2048-2050

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
    Check@CityULib
  3. Published

    Hydrogen-induced surface blistering of sample chuck materials in hydrogen plasma immersion ion implantation

    Chu, P. K. & Zeng, X., Sep 2001, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 19, 5, p. 2301-2306

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 7
    Check@CityULib
  4. Published

    Deposition and properties of tetrahedral amorphous carbon films prepared on magnetic hard disks

    Chan, C. Y., Lai, K. H., Fung, M. K., Wong, W. K., Bello, I., Huang, R. F., Lee, C. S., & 2 othersLee, S. T. & Wong, S. P., Jul 2001, In: Journal of Vacuum Science and Technology A. 19, 4, p. 1606-1610

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 17
    Check@CityULib
  5. Published

    Investigation of low-pressure elevated-temperature plasma immersion ion implantation of AISI 304 stainless steel

    Tian, X. & Chu, P. K., May 2001, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 19, 3, p. 1008-1012

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 13
    Check@CityULib
  6. Published

    Enhancement of tribological properties of 9Cr18 stainless steel by dual Mo and S Co implantation

    Zhang, T., Song, J., Li, G., Chu, P. K. H. & Brown, I. G., Jan 2001, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 19, 1, p. 295-298

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Check@CityULib
  7. Published

    Fracture resistance enhancement of diamond-like carbon/nitrogenated diamond-like carbon multilayer deposited by electron cyclotron resonance microwave plasma chemical vapor deposition

    Qi, J., Lai, K. H., Bello, I., Lee, C. S., Lee, S. T., Luo, J. B. & Wen, S. Z., Jan 2001, In: Journal of Vacuum Science and Technology A. 19, 1, p. 130-135

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 8
    Check@CityULib
  8. 2000
  9. Published

    Effects of plasma excitation power, sample bias, and duty cycle on the structure and surface properties of amorphous carbon thin films fabricated on AISI440 steel by plasma immersion ion implantation

    Zeng, Z. M., Tian, X. B., Kwok, T. K., Tang, B. Y., Fung, M. K. & Chu, P. K., Sep 2000, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 18, 5, p. 2164-2168

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
    Check@CityULib
  10. Published

    Nickel precipitation at nanocavities in separation by implantation of oxygen

    Zhang, M., Zeng, X., Chu, P. K., Scholz, R. & Lin, C., Sep 2000, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 18, 5, p. 2249-2253

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
    Check@CityULib
  11. 1999
  12. Published

    Dynamic mixing deposition/implantation in a plasma immersion configuration

    Tian, X. B., Zhang, T., Zeng, Z. M., Tang, B. Y. & Chu, P. K., Nov 1999, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 17, 6, p. 3255-3259

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 18
    Check@CityULib
  13. Published

    Mechanism of enhanced plasma transport of vacuum arc plasma through curved magnetic ducts

    Zhang, T., Zeng, Z. M., Tian, X. B., Tang, B. Y., Chu, P. K., Brown, I. G. & Zhang, H. X., Sep 1999, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 17, 5, p. 3074-3076

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
    Check@CityULib
  14. Published

    Bias-assisted etching of polycrystalline diamond films in hydrogen, oxygen, and argon microwave plasmas

    Zhang, W. J., Sun, C., Bello, I., Lee, C. S. & Lee, S. T., May 1999, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 17, 3, p. 763-767

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 5
    Check@CityULib
  15. Published

    Porous polycrystalline silicon conductivity sensor

    Han, P. G., Wong, H., Poon, M. C. & Wang, N., 1999, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 17, 4, p. 1832-1835

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
    Check@CityULib
  16. 1998
  17. Published

    Growth of high-temperature NiTi1-xHfx shape memory alloy thin films by laser ablation of composite targets

    Gu, H. D., Leung, K. M. & Chung, C. Y., Nov 1998, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 16, 6, p. 3420-3422

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 5
    Check@CityULib

  18. Cubic boron nitride thin film deposition by unbalanced magnetron sputtering and dc pulsed substrate biasing

    Otaño-Rivera, W., Pilione, L. J., Zapien, J. A. & Messier, R., May 1998, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 16, 3, p. 1331-1335

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 27
    Check@CityULib
  19. Published

    Synthesis, composition, surface roughness and mechanical properties of thin nitrogenated carbon films

    Chan, W., Zhou, B., Chung, Y., Lee, C. S. & Lee, S. T., 1998, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 16, 3, p. 1907-1911

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 55
    Check@CityULib
  20. 1997
  21. Published

    Diamond films grown by hot filament chemical vapor deposition from a solid carbon source

    Woo, H. K., Lee, S. T., Lee, C. S., Bello, I. & Lam, Y. W., Nov 1997, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 15, 6, p. 2988-2992

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 11
    Check@CityULib

  22. Near-field optical recording on the cyanine dye layer of a commercial compact disk-recordable

    Tsai, D. P. & Guo, W. R., 1997, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 15, 3, p. 1442-1445

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 25
    Check@CityULib

  23. Optical fiber structures studied by a tapping-mode scanning near-field optical microscope

    Tsai, D. P. & Li, W. K., 1997, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 15, 3, p. 1427-1431

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
    Check@CityULib
  24. 1996

  25. Simulation and dry etching of field emitter tips in Si

    Rakhshandehroo, M. R., Sukardi, F. & Pang, S. W., May 1996, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 14, 3 pt 2, p. 1832-1838

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 7
    Check@CityULib

  26. Production of nanometric particles in radio frequency glow discharges in mixtures of silane and methane

    Bertram, E., Costa, J., Viera, G. & Zhang, R. Q., Mar 1996, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 14, 2, p. 567-571

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 12
    Check@CityULib
Previous 1 2 3 4 Next