Journal of Vacuum Science and Technology A

Journal of Vacuum Science and Technology A

ISSNs: 0734-2101

Additional searchable ISSN (Electronic): 1520-8559

AVS Science and Technology Society, United States

Scopus rating (2021): CiteScore 4.4 SJR 0.676 SNIP 0.992

Journal

Journal Metrics
21 - 40 out of 76Page size: 20

Research Output

  1. 2006
  2. Published

    Optical emission from the aggregated state in poly [2-methoxy-5- (2′ -ethyl-hexyloxy)- p -phenylene vinylene]

    Kong, F., Wu, X. L., Yuan, R. K., Yang, C. Z., Siu, G. G. & Chu, P. K., Mar 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 2, p. 202-205

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 11
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  3. Published

    Effects of Al content on grain growth of solid solution (Ti,Al)N films

    Liu, Z. J. & Shen, Y. G., Jan 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 1, p. 174-177

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 6
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  4. Published

    Corrosion resistance and antithrombogenic behavior of la and Nd ion implanted stainless steels

    Jing, F. J., Jin, F. Y., Liu, Y. W., Wan, G. J., Liu, X. M., Zhao, X. B., Fu, R. K. Y., & 3 othersLeng, Y. X., Huang, N. & Chu, P. K., 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 5, p. 1790-1794

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 11
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  5. Published

    Thermal stability of sputter deposited nanocrystalline W 2N/amorphous Si3N4 coatings

    Fu, T., Shen, Y. G., Zhou, Z. F. & Li, K. Y., 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 6, p. 2094-2099 018606JVA.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 6
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  6. Writing and erasing efficiency analysis on optical-storage media using scanning surface potential microscopy

    Chen, S., Hou, S., Hsieh, J. H., Chen, H. K. & Tsai, D. P., 2006, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 24, 6, p. 2003-2007 005606JVA.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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  7. 2005
  8. Published

    Improvement of nitrogen retained dose using ammonia as a precursor in nitrogen plasma immersion ion implantation of silicon

    Wan, G. J., Yang, P., Fu, R. K. Y., Yao, Z. Q., Huang, N. & Chu, P. K., Sep 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 5, p. 1346-1349

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 7
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  9. Effect of plating current density and annealing on impurities in electroplated Cu film

    Liu, C., Wang, Y., Tsai, M., Feng, H., Chang, S. & Hwang, G., Jul 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 4, p. 658-662

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 22
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  10. Study of optical recording bits by scanning surface potential microscopy

    Chen, S., Lin, C., Lin, W. C. & Tsai, D. P., Jul 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 4, p. 663-665

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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  11. Published

    Surface and corrosion characteristics of carbon plasma implanted and deposited nickel-titanium alloy

    Poon, R. W. Y., Liu, X. Y., Chung, C. Y., Chu, P. K., Yeung, K. W. K., Lu, W. W. & Cheung, K. M. C., May 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 3, p. 525-530

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 17
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  12. Published

    Temperature-dependent morphology evolution of the submonolayer clusters grown on fcc metal (110) surfaces

    Liu, Z. J. & Shen, Y. G., Jan 2005, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 23, 1, p. 177-183

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 2
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  13. 2004

  14. Stacked polymer patterns imprinted using a soft inkpad

    Kong, Y. P., Tan, L., Pang, S. W. & Yee, A. F., Jul 2004, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 22, 4, p. 1873-1878

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
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  15. Published

    Effects of mesh-assisted carbon plasma immersion ion implantation on the surface properties of insulating silicon carbide ceramics

    Fu, R. K. Y., Fu, K. L., Tian, X. & Chu, P. K., Mar 2004, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 22, 2, p. 356-360

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 14
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  16. Published

    Characteristics and anticoagulation behavior of polyethylene terephthalate modified by C2H2 plasma immersion ion implantation-deposition

    Wang, J., Pan, C. J., Kwok, S. C. H., Yang, P., Chen, J. Y., Wan, G. J., Huang, N., & 1 othersChu, P. K., Jan 2004, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 22, 1, p. 170-175

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 13
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  17. 2003
  18. Published

    Microstructure of Mg-Ni thin film prepared by direct current magnetron sputtering and its properties as a negative electrode

    Ouyang, L. Z., Chung, C. Y., Wang, H. & Zhu, M., Nov 2003, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 21, 6, p. 1905-1908

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 10
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  19. Published

    Ion enhanced deposition by dual titanium and acetylene plasma immersion ion implantation

    Zeng, Z. M., Tian, X. B. & Chu, P. K., Jan 2003, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 21, 1, p. 175-179

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 2
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  20. 2002

  21. Characterization of cubic boron nitride growth using UV-extended real-time spectroscopic ellipsometry: Effect of plasma additions and dynamic substrate bias steps

    Zapien, J. A., Collins, R. W. & Messier, R., Jul 2002, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 20, 4, p. 1395-1397

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 11
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  22. Published

    Interface between poly (9,9-dioctylfluorene) and alkali metals: cesium, potassium, sodium, and lithium

    Fung, M. K., Lai, S. L., Bao, S. N., Lee, C. S., Lee, S. T., Wu, W. W., Inbasekaran, M., & 1 othersO'Brien, J. J., May 2002, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 20, 3, p. 911-918

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 20
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  23. Published

    Effects of bias voltage on the corrosion resistance of titanium nitride thin films fabricated by dynamic plasma immersion ion implantation-deposition

    Tian, X., Fu, R. K. Y. & Chu, P. K., Jan 2002, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 20, 1, p. 160-164

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 14
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  24. 2001
  25. Published

    Ion kinetic energy control in dual plasma deposition of thin films

    Wang, L. P., Tang, B. Y., Gan, K. Y., Tian, X. B. & Chu, P. K., Nov 2001, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 19, 6, p. 2851-2855

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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  26. Published

    Steady-state direct-current plasma immersion ion implantation using a multipolar magnetic field electron cyclotron resonance plasma source

    Zeng, X., Tong, H., Fu, R. K., Chu, P. K., Xu, Z. & Chen, Q., Nov 2001, In: Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films. 19, 6, p. 2889-2892

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 4
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