Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

ISSNs: 0734-211X

American Institute of Physics Publising LLC, United States

Journal

Journal Metrics
1 - 20 out of 35Page size: 20

Research Output

  1. 2008

  2. Control of DNA motion in microchannels integrated with dual electrodes

    Cardozo, B. L. & Pang, S. W., Nov 2008, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 6, p. 2578-2582

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 2
    Check@CityULib

  3. Patterning of polyfluorene based polymer light emitting diodes by reversal imprint lithography

    Cardozo, B. L. & Pang, S. W., Nov 2008, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 6, p. 2385-2389

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 4
    Check@CityULib

  4. Three-dimensional metal patterning over nanostructures by reversal imprint

    Peng, C., Cardozo, B. L. & Pang, S. W., 2008, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 2, p. 632-635

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 13
    Check@CityULib
  5. 2007

  6. Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry

    Al-Assaad, R. M., Regonda, S., Tao, L., Pang, S. W. & Hu, W., 2007, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 2396-2401

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 21
    Check@CityULib

  7. Integration of electrodes in Si channels using low temperature polymethylmethacrylate bonding

    Dukkipati, V. R. & Pang, S. W., 2007, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 2, p. 368-372

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 4
    Check@CityULib

  8. Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels

    Yang, B., Dukkipati, V. R., Li, D., Cardozo, B. L. & Pang, S. W., 2007, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 2352-2356

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 13
    Check@CityULib
  9. 2006

  10. Three-dimensional nanochannels formed by fast etching of polymer

    Peng, C. & Pang, S. W., Jul 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 1941-1946

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 5
    Check@CityULib

  11. Hybrid mold reversal imprint for three-dimensional and selective patterning

    Peng, C. & Pang, S. W., 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 6, p. 2968-2972

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 11
    Check@CityULib

  12. Multiple level nanochannels fabricated using reversal UV nanoimprint

    Yang, B. & Pang, S. W., 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 6, p. 2984-2987

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 26
    Check@CityULib

  13. Three-dimensional SU-8 structures by reversal UV imprint

    Hu, W., Yang, B., Peng, C. & Pang, S. W., 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 5, p. 2225-2229

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 47
    Check@CityULib
  14. 2005

  15. Effects of nanoimprinted patterns in tissue-culture polystyrene on cell behavior

    Hu, W., Yim, E. K. F., Reano, R. M., Leong, K. W. & Pang, S. W., Nov 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 6, p. 2984-2989

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 95
    Check@CityULib

  16. Sealed three-dimensional nanochannels

    Reano, R. M. & Pang, S. W., Nov 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 6, p. 2995-2999

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 13
    Check@CityULib

  17. Growth and magnetic properties of self-assembled (In, Mn)As quantum dots

    Chen, Y. F., Lee, W. N., Huang, J. H., Chin, T. S., Huang, R. T., Chen, F. R., Kai, J. J., & 3 othersAravind, K., Lin, I. N. & Ku, H. C., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 4, p. 1376-1378

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 10
    Check@CityULib
  18. 2004

  19. Duo-mold imprinting of three-dimensional polymeric structures

    Kong, Y. P., Low, H. Y., Pang, S. W. & Yee, A. F., Nov 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 3251-3256

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 32
    Check@CityULib

  20. Stability of functional polymers after plasticizer-assisted imprint lithography

    Reano, R. M., Kong, Y. P., Low, H. Y., Tan, L., Wang, F., Pang, S. W. & Yee, A. F., Nov 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 3294-3299

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 11
    Check@CityULib

  21. Imprinting of polymer at low temperature and pressure

    Tan, L., Kong, Y. P., Pang, S. W. & Yee, A. F., Sept 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 5, p. 2486-2492

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 33
    Check@CityULib
  22. 2003

  23. Imprinting polymer film on patterned substrates

    Tan, L., Kong, Y. P., Bao, L. R., Huang, X. D., Guo, L. J., Pang, S. W. & Yee, A. F., Nov 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 6, p. 2742-2748

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 33
    Check@CityULib

  24. Polymer inking as a micro- and nanopatterning technique

    Bao, L. R., Tan, L., Huang, X. D., Kong, Y. P., Guo, L. J., Pang, S. W. & Yee, A. F., Nov 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 6, p. 2749-2754

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 25
    Check@CityULib

  25. Thick and thermally isolated Si microheaters for microfabricated preconcentrators

    Tian, W. C. & Pang, S. W., Jan 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 274-279

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 14
    Check@CityULib
  26. 2002

  27. Nanoimprinting over topography and multilayer three-dimensional printing

    Bao, L. R., Cheng, X., Huang, X. D., Guo, L. J., Pang, S. W. & Yee, A. F., Nov 2002, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20, 6, p. 2881-2886

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 131
    Check@CityULib
Previous 1 2 Next