Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

ISSNs: 0734-211X

American Institute of Physics Publising LLC, United States

Journal

Journal Metrics
1 - 20 out of 27Page size: 20

Research Output

  1. 2009
  2. Published

    Background analysis of field-induced electron emission from nanometer-scale heterostructured emitters

    Filip, V., Nicolaescu, D., Fulga, I. C., Mitran, T. & Wong, H., 2009, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27, 2, p. 711-718

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 1
    Check@CityULib
  3. Published

    Photoluminescence from high-pressure-annealed silicon dioxide

    Wong, C. K., Misiuk, A., Wong, H. & Panas, A., 2009, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27, 1, p. 531-534

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 5
    Check@CityULib
  4. 2007
  5. Published

    Effects and mechanisms of nitrogen incorporation into hafnium oxide by plasma immersion implantation

    Wong, H., Sen, B., Yang, B. L., Huang, A. P. & Chu, P. K., 2007, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 1853-1858

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 21
    Check@CityULib
  6. 2006
  7. Published

    Modeling and characterization of direct-tunneling current in dual-layer ultrathin-gate dielectric films

    Wong, H. & Iwai, H., Jul 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 1785-1793

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 22
    Check@CityULib
  8. Published

    Si nanowires sheathed with thin diamondlike carbon films

    Qiu, T., Wu, X. L., Yang, L. W., Shen, P. N., Zhang, Z. Y., Siu, G. G. & Chu, P. K., Jul 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 1702-1704

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 1
    Check@CityULib
  9. Published

    Thermal annealing effects on the structure and electrical properties of Al2O3 gate dielectrics on fully depleted SiGe on insulator

    Di, Z., Zhang, M., Liu, W., Shen, Q., Luo, S., Song, Z., Lin, C., & 1 othersChu, P. K., May 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 3, p. 1151-1155

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 5
    Check@CityULib
  10. Published

    Quantum charge transportation in metal-oxide-Si structures with ultrathin oxide

    Filip, V., Wong, H. & Nicolaescu, D., Jan 2006, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 1, p. 38-45

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 6
    Check@CityULib
  11. 2005
  12. Published

    High-efficiency light-emitting device based on silicon nanostructures and tunneling carrier injection

    Wong, H., Filip, V. & Chu, P. L., Nov 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 6, p. 2449-2456

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 10
    Check@CityULib
  13. Published

    Dielectric properties enhancement of ZrO2 thin films induced by substrate biasing

    Huang, A. P., Chu, P. K., Yan, H. & Zhu, M. K., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 2, p. 566-569

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 31
    Check@CityULib
  14. Published

    Effects of B content on microstructure and mechanical properties of nanocomposite Ti-Bx-Ny thin films

    Lu, Y. H., Sit, P., Hung, T. F., Chen, H., Zhou, Z. F., Li, K. Y. & Shen, Y. G., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 2, p. 449-457

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 24
    Check@CityULib
  15. Published

    Fabrication and mechanism of relaxed SiGe-on-insulator by modified Ge condensation

    Di, Z., Zhang, M., Liu, W., Luo, S., Song, Z., Lin, C., Huang, A., & 1 othersChu, P. K., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 4, p. 1637-1640

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 17
    Check@CityULib
  16. Published

    Field electron emission from two-dimensional electron gas

    Filip, V., Nicolaescu, D., Wong, H., Nagao, M. & Chu, P. L., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 2, p. 657-664

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 8
    Check@CityULib
  17. 2004
  18. Published

    Formation of silicon on plasma synthesized aluminum nitride structure by Ion cutting

    Zhu, M., Chen, P., Fu, R. K. Y., Liu, W., Lin, C. & Chu, P. K., Nov 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 2748-2753

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 2
    Check@CityULib
  19. Published

    Interface bonding structure of hafnium oxide prepared by direct sputtering of hafnium in oxygen

    Wong, H., Ng, K. L., Zhan, N., Poon, M. C. & Kok, C. W., May 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 3, p. 1094-1100

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 66
    Check@CityULib
  20. Published

    Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO3 crystal

    Zhang, D., Wong, W. H. & Pun, E. Y. B., Jan 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 1, p. 283-285

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Check@CityULib
  21. Published

    Recent developments and applications of plasma immersion ion implantation

    Chu, P. K., Jan 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 1, p. 289-296

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 110
    Check@CityULib
  22. 2003
  23. Published

    Ion-cutting of Si onto glass by pulsed and direct-current plasma immersion ion implantation

    Lu, F., Qiao, D., Cai, M., Yu, P. K. L., Lau, S. S., Fu, R. K. Y., Hung, L. S., & 4 othersLi, C. P., Chu, P. K., Chien, H. C. & Liou, Y., Sept 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 5, p. 2109-2113

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 6
    Check@CityULib
  24. Published

    Silicon carbide formation by methane plasma immersion ion implantation into silicon

    An, Z., Fu, R. K. Y., Chen, P., Liu, W., Chu, P. K. & Lin, C., Jul 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 4, p. 1375-1379

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 15
    Check@CityULib
  25. Published

    Bonding and band offset in N2O-grown oxynitride

    Gritsenko, V. A., Wong, H., Kwok, W. M. & Xu, J. B., Jan 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 241-245

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 30
    Check@CityULib
  26. Published

    Microstructure and crystallinity of porous silicon and epitaxial silicon layers fabricated on p+ porous silicon

    Liu, W., Xie, X., Zhang, M., Shen, Q., Lin, C., Wang, L. & Chu, P. K., Jan 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 168-173

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 17
    Check@CityULib
Previous 1 2 Next