Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

ISSNs: 0734-211X

American Institute of Physics Publising LLC, United States

Journal

Journal Metrics
21 - 40 out of 62Page size: 20

Research Output

  1. 2005
  2. Published

    Dielectric properties enhancement of ZrO2 thin films induced by substrate biasing

    Huang, A. P., Chu, P. K., Yan, H. & Zhu, M. K., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 2, p. 566-569

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 31
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  3. Published

    Effects of B content on microstructure and mechanical properties of nanocomposite Ti-Bx-Ny thin films

    Lu, Y. H., Sit, P., Hung, T. F., Chen, H., Zhou, Z. F., Li, K. Y. & Shen, Y. G., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 2, p. 449-457

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 24
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  4. Published

    Fabrication and mechanism of relaxed SiGe-on-insulator by modified Ge condensation

    Di, Z., Zhang, M., Liu, W., Luo, S., Song, Z., Lin, C., Huang, A., & 1 othersChu, P. K., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 4, p. 1637-1640

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 17
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  5. Published

    Field electron emission from two-dimensional electron gas

    Filip, V., Nicolaescu, D., Wong, H., Nagao, M. & Chu, P. L., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 2, p. 657-664

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 8
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  6. Growth and magnetic properties of self-assembled (In, Mn)As quantum dots

    Chen, Y. F., Lee, W. N., Huang, J. H., Chin, T. S., Huang, R. T., Chen, F. R., Kai, J. J., & 3 othersAravind, K., Lin, I. N. & Ku, H. C., 2005, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 4, p. 1376-1378

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 10
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  7. 2004

  8. Duo-mold imprinting of three-dimensional polymeric structures

    Kong, Y. P., Low, H. Y., Pang, S. W. & Yee, A. F., Nov 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 3251-3256

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 32
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  9. Published

    Formation of silicon on plasma synthesized aluminum nitride structure by Ion cutting

    Zhu, M., Chen, P., Fu, R. K. Y., Liu, W., Lin, C. & Chu, P. K., Nov 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 2748-2753

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 2
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  10. Stability of functional polymers after plasticizer-assisted imprint lithography

    Reano, R. M., Kong, Y. P., Low, H. Y., Tan, L., Wang, F., Pang, S. W. & Yee, A. F., Nov 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 6, p. 3294-3299

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 11
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  11. Imprinting of polymer at low temperature and pressure

    Tan, L., Kong, Y. P., Pang, S. W. & Yee, A. F., Sept 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 5, p. 2486-2492

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 33
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  12. Published

    Interface bonding structure of hafnium oxide prepared by direct sputtering of hafnium in oxygen

    Wong, H., Ng, K. L., Zhan, N., Poon, M. C. & Kok, C. W., May 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 3, p. 1094-1100

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 66
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  13. Published

    Optimized lift-off technique for deposition of high-quality Ti strip on LiNbO3 crystal

    Zhang, D., Wong, W. H. & Pun, E. Y. B., Jan 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 1, p. 283-285

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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  14. Published

    Recent developments and applications of plasma immersion ion implantation

    Chu, P. K., Jan 2004, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 22, 1, p. 289-296

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 110
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  15. 2003

  16. Imprinting polymer film on patterned substrates

    Tan, L., Kong, Y. P., Bao, L. R., Huang, X. D., Guo, L. J., Pang, S. W. & Yee, A. F., Nov 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 6, p. 2742-2748

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 33
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  17. Polymer inking as a micro- and nanopatterning technique

    Bao, L. R., Tan, L., Huang, X. D., Kong, Y. P., Guo, L. J., Pang, S. W. & Yee, A. F., Nov 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 6, p. 2749-2754

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 25
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  18. Published

    Ion-cutting of Si onto glass by pulsed and direct-current plasma immersion ion implantation

    Lu, F., Qiao, D., Cai, M., Yu, P. K. L., Lau, S. S., Fu, R. K. Y., Hung, L. S., & 4 othersLi, C. P., Chu, P. K., Chien, H. C. & Liou, Y., Sept 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 5, p. 2109-2113

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 6
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  19. Published

    Silicon carbide formation by methane plasma immersion ion implantation into silicon

    An, Z., Fu, R. K. Y., Chen, P., Liu, W., Chu, P. K. & Lin, C., Jul 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 4, p. 1375-1379

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 15
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  20. Published

    Bonding and band offset in N2O-grown oxynitride

    Gritsenko, V. A., Wong, H., Kwok, W. M. & Xu, J. B., Jan 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 241-245

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 30
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  21. Published

    Microstructure and crystallinity of porous silicon and epitaxial silicon layers fabricated on p+ porous silicon

    Liu, W., Xie, X., Zhang, M., Shen, Q., Lin, C., Wang, L. & Chu, P. K., Jan 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 168-173

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 17
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  22. Thick and thermally isolated Si microheaters for microfabricated preconcentrators

    Tian, W. C. & Pang, S. W., Jan 2003, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 21, 1 SPEC., p. 274-279

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 14
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  23. 2002

  24. Nanoimprinting over topography and multilayer three-dimensional printing

    Bao, L. R., Cheng, X., Huang, X. D., Guo, L. J., Pang, S. W. & Yee, A. F., Nov 2002, In: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 20, 6, p. 2881-2886

    Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

    Scopus citations: 131
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