Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena

ISSNs: 0734-211X

American Institute of Physics Publising LLC, United States

Journal

Journal Metrics

Research Output

  1. 2009
  2. Published

    Background analysis of field-induced electron emission from nanometer-scale heterostructured emitters

    Filip, V., Nicolaescu, D., Fulga, I. C., Mitran, T. & Wong, H., 2009, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27, 2, p. 711-718

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 1
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  3. Published

    Photoluminescence from high-pressure-annealed silicon dioxide

    Wong, C. K., Misiuk, A., Wong, H. & Panas, A., 2009, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 27, 1, p. 531-534

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 5
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  4. 2008
  5. Control of DNA motion in microchannels integrated with dual electrodes

    Cardozo, B. L. & Pang, S. W., Nov 2008, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 6, p. 2578-2582

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 2
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  6. Patterning of polyfluorene based polymer light emitting diodes by reversal imprint lithography

    Cardozo, B. L. & Pang, S. W., Nov 2008, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 6, p. 2385-2389

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 4
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  7. Three-dimensional metal patterning over nanostructures by reversal imprint

    Peng, C., Cardozo, B. L. & Pang, S. W., 2008, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 26, 2, p. 632-635

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 13
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  8. 2007
  9. Characterizing nanoimprint profile shape and polymer flow behavior using visible light angular scatterometry

    Al-Assaad, R. M., Regonda, S., Tao, L., Pang, S. W. & Hu, W., 2007, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 2396-2401

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 21
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  10. Published

    Effects and mechanisms of nitrogen incorporation into hafnium oxide by plasma immersion implantation

    Wong, H., Sen, B., Yang, B. L., Huang, A. P. & Chu, P. K., 2007, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 1853-1858

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 21
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  11. Integration of electrodes in Si channels using low temperature polymethylmethacrylate bonding

    Dukkipati, V. R. & Pang, S. W., 2007, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 2, p. 368-372

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 4
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  12. Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels

    Yang, B., Dukkipati, V. R., Li, D., Cardozo, B. L. & Pang, S. W., 2007, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 25, 6, p. 2352-2356

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 12
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  13. 2006
  14. Published

    Modeling and characterization of direct-tunneling current in dual-layer ultrathin-gate dielectric films

    Wong, H. & Iwai, H., Jul 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 1785-1793

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 20
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  15. Published

    Si nanowires sheathed with thin diamondlike carbon films

    Qiu, T., Wu, X. L., Yang, L. W., Shen, P. N., Zhang, Z. Y., Siu, G. G. & Chu, P. K., Jul 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 1702-1704

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 1
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  16. Three-dimensional nanochannels formed by fast etching of polymer

    Peng, C. & Pang, S. W., Jul 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 4, p. 1941-1946

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 4
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  17. Published

    Thermal annealing effects on the structure and electrical properties of Al2O3 gate dielectrics on fully depleted SiGe on insulator

    Di, Z., Zhang, M., Liu, W., Shen, Q., Luo, S., Song, Z., Lin, C. & 1 others, Chu, P. K., May 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 3, p. 1151-1155

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 5
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  18. Published

    Quantum charge transportation in metal-oxide-Si structures with ultrathin oxide

    Filip, V., Wong, H. & Nicolaescu, D., Jan 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 1, p. 38-45

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 6
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  19. Hybrid mold reversal imprint for three-dimensional and selective patterning

    Peng, C. & Pang, S. W., 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 6, p. 2968-2972

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 10
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  20. Multiple level nanochannels fabricated using reversal UV nanoimprint

    Yang, B. & Pang, S. W., 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 6, p. 2984-2987

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 24
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  21. Three-dimensional SU-8 structures by reversal UV imprint

    Hu, W., Yang, B., Peng, C. & Pang, S. W., 2006, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 24, 5, p. 2225-2229

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 43
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  22. 2005
  23. Effects of nanoimprinted patterns in tissue-culture polystyrene on cell behavior

    Hu, W., Yim, E. K. F., Reano, R. M., Leong, K. W. & Pang, S. W., Nov 2005, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 6, p. 2984-2989

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 84
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  24. Published

    High-efficiency light-emitting device based on silicon nanostructures and tunneling carrier injection

    Wong, H., Filip, V. & Chu, P. L., Nov 2005, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 6, p. 2449-2456

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 10
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  25. Sealed three-dimensional nanochannels

    Reano, R. M. & Pang, S. W., Nov 2005, In : Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures. 23, 6, p. 2995-2999

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

    Scopus citations: 13
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