Journal of Micro/Nanopatterning, Materials, and Metrology

Journal of Micro/Nanopatterning, Materials, and Metrology

ISSNs: 1932-5150, 1537-1646, 1932-5134, 2708-8340

Additional searchable ISSN (Electronic): 1932-5134, 2708-8340

S P I E - International Society for Optical Engineering, United States

Scopus rating (2022): CiteScore 2.9 SJR 0.298 SNIP 1.036

Journal

Journal Metrics

Research Output

  1. 2015
  2. Published

    Development of lossy and near-lossless compression methods for wafer surface structure digital holograms

    Zhang, H., Zhou, W., Leber, D., Hu, Z., Yang, X., Tsang, P. W. M. & Poon, T., 1 Oct 2015, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 14, 4, 41304.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 9
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  3. 2011
  4. Published

    Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect

    Wu, Y., Zhou, J. & Pun, E. Y. B., Oct 2011, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 10, 4, 49701.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 5
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  5. 2010
  6. Published

    SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique

    Huang, C., Pun, Y. & Wang, W., 2010, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 9, 2, 23013.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 3
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  7. 2009
  8. Published

    Large-size P-type silicon microchannel plates prepared by photoelectrochemical etching

    Yuan, D., Ci, P., Tian, F., Shi, J., Xu, S., Xin, P., Wang, L., & 1 othersChu, P. K., Jul 2009, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 8, 3, 033012.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 27
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  9. Novel approach for microassembly of three-dimensional rotary MOEMS mirrors

    Wang, L., Mills, J. K. & Cleghorn, W. L., 2009, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 8, 4, 43035.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 4
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  10. 2006
  11. Pattern fidelity in nanoimprinted films using critical dimension small angle x-ray scattering

    Jones, R. L., Soles, C. L., Lin, E. K., Hu, W., Reano, R. M., Pang, S. W., Weigand, S. J., & 2 othersKeane, D. T. & Quintana, J. P., Jan 2006, In: Journal of Micro/Nanolithography, MEMS, and MOEMS. 5, 1, p. 1-7 013001.

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Scopus citations: 17
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