International Conference on Solid-State and Integrated Circuit Technology Proceedings

International Conference on Solid-State and Integrated Circuit Technology Proceedings

Journal

Journal Metrics

Research Output

  1. 1998
  2. Effect of amorphous Si on the epitaxial growth of CoSi2 by Co/Si/Ti/Si solid state epitaxy

    Qu, X. P., Ru, G. P., Liu, J. H., Mo, H. X., Liu, J., Li, B. Z. & Chu, P. K., 1998, In: International Conference on Solid-State and Integrated Circuit Technology Proceedings. p. 264-267

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 2
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  3. Published

    Microcavity engineering using plasma immersion ion implantation

    Chu, P. K., 1998, In: International Conference on Solid-State and Integrated Circuit Technology Proceedings. p. 83-86

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Check@CityULib
  4. Novel approach to study patterned thin film local stress for microelectronics application

    Zheng, D. W., Wang, X., Shyu, K., Chang, C. T., Wen, W. & Tu, K. N., 1998, In: International Conference on Solid-State and Integrated Circuit Technology Proceedings. p. 568-571

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Check@CityULib
  5. Si/CoSi2/Si(100) heteroepitaxial growth by molecular beam epitaxy and novel solid phase epitaxy

    Qu, X. P., Ru, G. P., Li, B. Z., Qin, J., Jiang, Z. M. & Chu, P., 1998, In: International Conference on Solid-State and Integrated Circuit Technology Proceedings. p. 268-270

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Check@CityULib