IEEE Transactions on Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing

ISSNs: 0894-6507

Additional searchable ISSN (Electronic): 1558-2345

Institute of Electrical and Electronics Engineers, United States

Scopus rating (2022): CiteScore 5.4 SJR 1.129 SNIP 1.45

Journal

Journal Metrics
1 - 5 out of 5Page size: 20

Research Output

  1. 2023
  2. Published

    Cross-chamber Data Transferability Evaluation for Fault Detection and Classification in Semiconductor Manufacturing

    Zhu, F., Jia, X., Li, W., Xie, M., Li, L. & Lee, J., Feb 2023, In: IEEE Transactions on Semiconductor Manufacturing. 36, 1, p. 68-77

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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  3. 2017
  4. Published

    A hierarchical intelligent methodology for spatiotemporal control of wafer temperature in rapid thermal processing

    Zhang, X., Li, H., Wang, B. & Ma, S., 1 Feb 2017, In: IEEE Transactions on Semiconductor Manufacturing. 30, 1, p. 52-59 7590160.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 8
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  5. 2011
  6. Published

    Detection of spatial defect patterns generated in semiconductor fabrication processes

    Yuan, T., Kuo, W. & Bae, S. J., Aug 2011, In: IEEE Transactions on Semiconductor Manufacturing. 24, 3, p. 392-403 5776703.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 96
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  7. Published

    Modeling of integrated circuit yield using a spatial nonhomogeneous poisson process

    Hwang, J. Y., Kuo, W. & Ha, C., Aug 2011, In: IEEE Transactions on Semiconductor Manufacturing. 24, 3, p. 377-384 5752258.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

    Scopus citations: 5
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  8. 2009
  9. Published

    Accurate conjunction of yield models for fault-tolerant memory integrated circuits

    Ha, C., Kuo, W. & Hwang, J. Y., 2009, In: IEEE Transactions on Semiconductor Manufacturing. 22, 3, p. 344-350 5159401.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

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