IEEE Transactions on Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing

ISSNs: 0894-6507

Additional searchable ISSN (Electronic): 1558-2345

Institute of Electrical and Electronics Engineers, United States

Scopus rating (2021): CiteScore 5.8 SJR 1.318 SNIP 1.429

Journal

Journal Metrics

Research Output

  1. 2017
  2. Published

    A hierarchical intelligent methodology for spatiotemporal control of wafer temperature in rapid thermal processing

    Zhang, X., Li, H., Wang, B. & Ma, S., 1 Feb 2017, In: IEEE Transactions on Semiconductor Manufacturing. 30, 1, p. 52-59 7590160.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 6
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  3. 2011
  4. Published

    Detection of spatial defect patterns generated in semiconductor fabrication processes

    Yuan, T., Kuo, W. & Bae, S. J., Aug 2011, In: IEEE Transactions on Semiconductor Manufacturing. 24, 3, p. 392-403 5776703.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 72
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  5. Published

    Modeling of integrated circuit yield using a spatial nonhomogeneous poisson process

    Hwang, J. Y., Kuo, W. & Ha, C., Aug 2011, In: IEEE Transactions on Semiconductor Manufacturing. 24, 3, p. 377-384 5752258.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Scopus citations: 3
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  6. 2009
  7. Published

    Accurate conjunction of yield models for fault-tolerant memory integrated circuits

    Ha, C., Kuo, W. & Hwang, J. Y., 2009, In: IEEE Transactions on Semiconductor Manufacturing. 22, 3, p. 344-350 5159401.

    Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

    Check@CityULib